Grating Substrates for ID32 XES

Manufacture of two or three concave spherically polished silicon grating blanks. Overall dimensions 200 mm x 30 mm x 30 mm (LxWxH). Clear Aperture 180 mm x 14 mm. Radius 26 +/- 0.5 m. Slope error < 1 µrad rms. Surface roughness < 0.3 nm rms.