Epiluvac AB

Epiluvac AB builds equipment for material research. This includes advanced gas mixing systems, vacuum chambers, high temperature cells and customized design solutions. More than 30 years of experience from the semiconductor industry.

Core Competencies

- Gas mixing systems
- Vacuum High temperature cells
- Chemical vapour deposition
- Epitaxy, corrosive gases
- Ultra-high clean gas systems

Industry Sectors

- Material research
- Semiconductor
- High temperature processes

References

Different kinds of epitaxial equipment for semiconductor industry (CVD, UHV-CVD, sublimation, HTCVD, graphene), customized equipment for different process steps.

Company size

Small

Procurement code(s)

- Electronics and radio frequency

- Gases, chemicals, waste collection and radiation equipment

- Vacuum and low temperature