Epiluvac AB
Science Park Ideon, 223 70 Lund, Sweden
+46 46 288 02 20

Roger Nilsson
+46 708 63 08 46


Company Profile

Epiluvac AB builds equipment for material research. This includes advanced gas mixing systems, vacuum chambers, high temperature cells and customized design solutions. More than 30 years of experience from the semiconductor industry.

Core Competences

  • Gas mixing systems
  • Vacuum High temperature cells
  • Chemical vapour deposition
  • Epitaxy, corrosive gases
  • Ultra-high clean gas systems

Industry Sectors

  • Material research
  • Semiconductor
  • High temperature processes


Different kinds of epitaxial equipment for semiconductor industry (CVD, UHV-CVD, sublimation, HTCVD, graphene), customized equipment for different process steps.

Company size


Procurement categories

- Electronics and radio frequency
- Gases, chemicals, waste collection and radiation equipment
- Vacuum and low temperature

Big Science Sweden contact

Frida Tibblin Citron