Science Park Ideon, 223 70 Lund, Sweden
+46 46 288 02 20
+46 708 63 08 46
Epiluvac AB builds equipment for material research. This includes advanced gas mixing systems, vacuum chambers, high temperature cells and customized design solutions. More than 30 years of experience from the semiconductor industry.
- Gas mixing systems
- Vacuum High temperature cells
- Chemical vapour deposition
- Epitaxy, corrosive gases
- Ultra-high clean gas systems
- Material research
- High temperature processes
Different kinds of epitaxial equipment for semiconductor industry (CVD, UHV-CVD, sublimation, HTCVD, graphene), customized equipment for different process steps.