Epiluvac

Science Park Ideon
223 70
Lund
+46 46 288 02 20

Roger Nilsson
CTO
+46 708 63 08 46
r.nilsson@epiluvac.com

www.epiluvac.com

Company Profile

Epiluvac AB builds equipment for material research. This includes advanced gas mixing systems, vacuum chambers, high temperature cells and customized design solutions. More than 30 years of experience from the semiconductor industry.

Core Competences

  • Gas mixing systems
  • Vacuum High temperature cells
  • Chemical vapour deposition
  • Epitaxy, corrosive gases
  • Ultra-high clean gas systems

Industry Sectors

  • Material research
  • Semiconductor
  • High temperature processes

References

Different kinds of epitaxial equipment for semiconductor industry (CVD, UHV-CVD, sublimation, HTCVD, graphene), customized equipment for different process steps.

Company size

Small