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Epiluvac

www.epiluvac.com

Company Profile 
Epiluvac AB builds equipment for material research. This includes advanced gas mixing systems, vacuum chambers, high temperature cells and customized design solutions. More than 30 years of experience from the semiconductor industry.

Core Competences
Gas mixing systems, vacuum, high temperature cells, chemical vapour deposition, epitaxy, corrosive gases, ultra-high clean gas systems.

Industry Sectors
Material research, semiconductor, high temperature processes

References
Different kinds of epitaxial equipment for semiconductor industry (CVD, UHV-CVD, sublimation, HTCVD, graphene), customized equipment for different process steps.

Company size
Small

Procurement codes
Electronics and radio frequency
Vacuum and low temperature
Gases, chemicals, waste collection and radiation equipment

Contact information

Epiluvac AB
Science Park Ideon, SE-223 70 Lund, Sweden
+46 46 288 02 20

Roger Nilsson
CTO
+46 708 63 08 46
info@epiluvac.com